| 摘要 |
PURPOSE: To prevent dielectric breakdown of a piezoelectric actuator and improve the reliability, by installing ventilation mechanism which ventilates dry air in a casing a piezoelectric element. CONSTITUTION: An air piping 15 for supplying dry air 27 is connected with the side surface of a casing 26. A plurality of air holes 60 for discharging dry air supplied to The casing 26 are formed in a plate spring 30. By a vibration isolator using a piezoelectric actuator 14, dry air 27 is supplied to the inside of the casing 26 which houses a piezoelectric element 42, and the dry air supplied to the inside of the casing 26 is discharged to the outside of the casing 26 through the air holes 60. As the result, it can be prevented that the atmospheric humidity in the casing 26 increases and heat is confined in the casing 26. Thereby the environment for excellently maintaining the performance of the piezoelectric element 42 can be formed, so that the performance of the piezoactuator unit 14 can be stabilized. |
