发明名称 SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
摘要 PURPOSE: To have a multivalue memory having a small memory array area together with allowing formation of an offset region with good accuracy. CONSTITUTION: Offset source/drain regions (N-type diffusion layers) 6 are formed so that their side end parts may be located about on the extension line of the outside surfaces of the sidewall insulation layers 5 located on both sides of the first gate electrodes 3. These n-type diffusion layers 6 are self-matchedly formed by ion implantation having a sidewall insulation layers 5. Thereby, offset regions 17 are also self-matchedly formed.
申请公布号 JPH08153806(A) 申请公布日期 1996.06.11
申请号 JP19940294736 申请日期 1994.11.29
申请人 MITSUBISHI DENKI SEMICONDUCTOR SOFTWARE KK;MITSUBISHI ELECTRIC CORP 发明人 OKUGAKI AKIRA;MORI SHINICHI;KODA KENJI;TEIKA HIROMI
分类号 G11C11/56;G11C17/12;H01L21/8246;H01L27/112 主分类号 G11C11/56
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