发明名称 ELECTRONIC PARTS STOCKER AND STORING METHOD OF ELECTRONIC PARTS
摘要 <p>PURPOSE: To improve productivity of electronic parts by suppressing the adhesion of foreign matters to the parts due to the static electricity generated when the parts are stored in, taken out from, or put in an electronic stocker and simultaneously cleaning the parts and removing the electrostatic electricity. CONSTITUTION: An electronic parts stocker which keeps electronic parts 11 which are apt to be easily damaged by foreign matters adhering to the parts in a clean atmosphere is provided with ionizers 2-1 to 2-6 as non-contacting static electricity removing means for electronic parts at a plurality of locations near and around the parts 11.</p>
申请公布号 JPH08153774(A) 申请公布日期 1996.06.11
申请号 JP19940296300 申请日期 1994.11.30
申请人 FUJITSU LTD 发明人 TAKAO HIROAKI
分类号 H01L21/673;H01L21/68;(IPC1-7):H01L21/68 主分类号 H01L21/673
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