| 摘要 |
PURPOSE: To reduce the floating amount of a magnetic head by providing a rough layer with irregularities on the surface thereof which is formed of an Al-M based alloy material (M is a metal which can form carbide) on a surface of a substrate and a metallic magnetic layer on the rough layer. CONSTITUTION: An Si alloy layer 2 containing 1wt.% of Al is formed 20nm thick by DC magnetron sputtering on a carbon substrate 1 with an Ar gas pressure of 2mTorr and a substrate temperature of 25 deg.C. Irregularities of 15ÅRa are formed on the surface of the layer like many sea islands. Then, a Cr layer 3 is formed 40nm thick by DC magnetron sputtering on the Al-Si layer 2 with an Ar gas pressure of 2mTorr and a substrate temperature of 260 deg.C. A CoCrPt series alloy magnetic layer 4 is subsequently formed 50nm thick, and a protecting layer 6 of glass carbon is further formed on the magnetic layer 4 by DC magnetron sputtering. Accordingly, the floating amount of a magnetic head is reduced. A magnetic recording medium which can meet high- density recording and has superior running properties and durability is obtained.
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