| 摘要 |
<p>PURPOSE: To obtain a tension sensor in which a temperature drift is small and whose reliability and practicality are high by a method wherein at least a part of a magnetostrictive film is trimmed in parallel in the length direction of a shaft. CONSTITUTION: A shaft 1 is used as a tension transmission member, and a magnetostrictive film 2 is fixed to the surface of the shaft 1 by using a sputtering method. Then, a trimming part 21 whose circumference is surrounded by the film is formed at the inside of the magnetostrictive film 2, and the trimming part 21 is formed by using a laser in such a way that its width and its angle with reference to the axial direction are changed. Exciting coils and detection coils are wound around the shaft 1 which has been manufactured in this manner. As the coils, an exciting coil 31 and a detection coil 41 are formed around the magnetostrictive film 2, and an exciting coil 32 and a detection coil 42 are formed in a part in which the magnetostrictive film 2 does not exist. A yoke 5 is installed on the outer circumference of the respective coils. Then, the two exciting coils are connected in series, and a strain which is generated on the surface of the tension transmission member is detected.</p> |
