发明名称 PELLET TRANSFER DEVICE
摘要 <p>PURPOSE: To reduce a weight of a movable part and enable a high-speed transfer so as to enhance productivity. CONSTITUTION: A pellet transfer device is provided with a screw shaft 2 having a thread portion 2a, a rotary frame 3 supported rotatably on a screw shaft 2, a transfer arm 4 meshed with the thread portion 2a of the screw shaft 2 and engaged with the rotary frame 2 such that it is rotatable with the rotary frame 3, while being vertically movable relative to the rotary frame 3, a collet 5 mounted on the transfer arm 4, a vertical-elevation drive motor 11 which rotates the screw shaft 2, and a rotary drive motor which tilts the rotary frame 3.</p>
申请公布号 JPH08148542(A) 申请公布日期 1996.06.07
申请号 JP19940314280 申请日期 1994.11.25
申请人 SHINKAWA LTD;SYMTEC CORP 发明人 SUGIURA KAZUO;KUSHIMA YOSHIMITSU;KANAYAMA NAOKI
分类号 B65G47/91;B25J17/02;B65G49/07;H01L21/00;H01L21/52;H01L21/677;(IPC1-7):H01L21/68 主分类号 B65G47/91
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