METHOD AND APPARATUS FOR ADJUSTING RESONANT FREQUENCY OF VIBRATOR

摘要

PURPOSE: To provide a method and an apparatus for adjusting the resonant frequency of a vibrator efficiently whereby the adjustment equipment is made compact and adjustment procedures are simplified. CONSTITUTION: A stage 20 is set on a platform 21 to place a vibrator 1. A working chamber 18 formed by a measuring/processing container 17 tightly covering/sealing the stage 20 is connected via a discharge valve 22 to a vacuum pump 12 for evacuation when the resonant frequency is measured, and to a reaction gas-feeding means 13 for feeding a reaction gas at the laser-assisted etching time via a gas feed valve 23. A laser beam-casting means 11 is arranged in the vicinity of the measuring/processing container 17, and a mirror 25 for guiding laser beams to an irradiation point of the vibrator 1 is set on an optical path of the laser beams. A monitor means 15 is disposed on the top wall of the container 17 to monitor the state of the laser-assisted etching via a glass 19 passing laser beams.