| 摘要 |
PURPOSE: To obtain an accurate pattern without introducing the complication of a facility by eliminating the operation for obtaining the development correction coefficient of a developing time by an experiment. CONSTITUTION: A developing tank 3 in which developer 2 is fully filled, and electrodes 6 dipped in the developer 2 of the tank 3 are provided. A board 8 exposed and coated with resist 7 is placed on a support base 4, dipped in the developer 2 and developed. Suitable developing time TDT is calculated by a TDT calculator 10 based on the development correction coefficient K calculated by a development correction coefficient calculator 12 and stored in a development correction coefficient memory circuit 11. |
