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发明名称
APPARATUS FOR INSPECTION OF DEFECT OF LIQUID CRYSTAL PANEL
摘要
申请公布号
JPH08145848(A)
申请公布日期
1996.06.07
申请号
JP19940284880
申请日期
1994.11.18
申请人
SHARP CORP
发明人
SATO KUNIHIRO
分类号
G01B11/30;G01M11/00;G01R31/00;G02F1/13;H01L21/66;(IPC1-7):G01M11/00
主分类号
G01B11/30
代理机构
代理人
主权项
地址
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