发明名称 THETA-THETA SCANNING X-RAY EQUIPMENT
摘要 PURPOSE: To reduce vibration propagated to a sample and thereby to enable highly-accurate measurement of X-ray reflectance relating to a liquid sample, in particular, in θ-θ scanning X-ray equipment of a type wherein both of an X-ray source and an X-ray counter are rotated around the sample. CONSTITUTION: θ-θ scanning X-ray equipment having a sample support stand 13 whereon a sample Sa is set, an X-ray source S which moves in rotation by θs around the sample Sa on the sample support stand 13 and an X-ray counter 3 which moves in rotation by θd around the sample Sa . A gonio-frame 5 supporting the X-ray source S and the X-ray counter 3 and the sample support stand 13 and installed separately and independently on a floor 11. By this structure of separate and independent installation, the vibration of the gonioframe 5 caused by the θs rotation, the θd rotation, etc., is prevented from being propagated to the sample Sa .
申请公布号 JPH08145917(A) 申请公布日期 1996.06.07
申请号 JP19940314035 申请日期 1994.11.24
申请人 RIGAKU CORP 发明人 DOSHIYOU AKIHIDE
分类号 G01N23/207 主分类号 G01N23/207
代理机构 代理人
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