| 摘要 |
PURPOSE: To provide an acceleration-detecting apparatus which can detect an abnormality of an equipment immediately and improve the measurement reliability. CONSTITUTION: The acceleration-detecting apparatus has a cantilevered acceleration-detecting beam 3 at a base 5 on a package substrate 7a. The strain generated by the swing of a weight 6 set at the front end of the detecting beam 3 is detected with the use of a bridge circuit 1A comprising four gauge resistors 1. If an abnormality that the base 5 is separated from the package substrate 7a is brought about, an abnormality detection electrode 12 set at the weight 6 becomes electrically connected with the package substrate 7a which is a GND. As a result, an output is fixed at a Low (or High) level, informing of abnormality. |
