发明名称 MANUFACTURE OF LEAD FRAME
摘要 PURPOSE: To provide a new manufacturing method for lead frame capable of performing fine patterning and reducing costs easily, of preventing deformation of leads in production process and of easily plating the leads as required. CONSTITUTION: A lead 3 is formed on the surface of a lead forming substrate 2 through an etching stop film 3, a hole 8 is formed by selective etching on both the surfaces of the substrate 2, a portion corresponding to a lead forming region of the lead-forming substrate 2 is made thinner, a lead holding film 10 having a device hole 11 and an outer lead bonding slit 12 is adhered to the surface of the lead forming substrate 2, a thinned portion 9 corresponding to a lead forming region of the lead forming substrate 2 is removed by selective etching from the rear surface, and an etching stop film 4 is removed by etching.
申请公布号 JPH08148625(A) 申请公布日期 1996.06.07
申请号 JP19940314168 申请日期 1994.11.22
申请人 SONY CORP 发明人 OSAWA KENJI;ITO MAKOTO
分类号 C23F1/00;H01L21/48;H01L21/60;H01L23/50;(IPC1-7):H01L23/50 主分类号 C23F1/00
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