METHOD AND DEVICE FOR EVALUATING MATERIAL OF SEMICONDUCTOR WAFER PACKING CONTAINER

摘要

PURPOSE: To provide a method and device for evaluating the material of semiconductor wafer packing container by which the suitablity of the material of the semiconductor wafer packing container can be evaluated in a short period without storing it for a long period. CONSTITUTION: An inactive gas 10 is purified by a desiccant 21 and activated carbon 31. Volatile components from material pieces 51a and 51b are extracted by using the gas 10. Moisture content from a pure water 61 is extracted by using the gas 10. A semiconductor wafer 71 is put into an evaluation container 7. The inactive gas 10 which extracts the volatile components and moisture content is filled in the container 7. A large amount of volatile component is extracted from the material as a candidate for packing container, and the influence of the volatile component on semiconductor wafer is evaluated in a short period.