| 摘要 |
The sensor comprises a massive stationary part (1), a massive moving part (2) and two plates made of a piezoelectric material (31;32) vibrating in bending mode, each (31) of the plates having ends integral with the massive parts, and a longitudinal side which supports first and second electrodes. In order to improve the piezoelectric coupling in the sensor, and to subject the vibrating plates principally to extension and compression strains, a quarter of the length, or preferably the central half, of the side of the plate supports longitudinal symmetrical first electrode strips (3421, 3431) and an axial second electrode strip (3422). The sensor also comprises articulations (441, 442), integral with the massive parts, which are stepped so as to chemically manufacture in a single etching stage, a wafer of piezoelectric material of uniform thickness (E), in order to obtain a monolithic body for the sensor, which is preferably symmetrical with respect to a central axis (Z'Z). <IMAGE> |
