| 摘要 |
PURPOSE: To provide a vibration control mechanism by a piezoelectric element capable of making a vibration mechanism system stably and correctly operate without being affected by temp. environments, etc., in a vibration system provided with a scanning mirror. CONSTITUTION: A scanning mirror vibration control mechanism is provided with a vibration system provided with a scanning mirror 1 attached to a housing 3 and a torsion spring 2 holding both ends of the scanning mirror 1. Moreover, the mechanism is provided with a period varying means provided with a piezoelectric element 7 varying the period of the vibration system by varying the tension of the torsion spring 2. Further, this vibration control mechanism is provided with this scanning mirror vibration control mechanism, an encoder 11 attached to the scanning mirror 1 and a phase comparator 25 converting a digital signal from the encoder 11 into an analog signal via a waveform shaping part 23 and a D/A converter 24 and comparing the phase of the analog signal with that of a reference signal set as reference in advance. Then, the period of the vibration system is stabilized by controlling the piezoelectric element 7. |
