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发明名称
SEMICONDUCTOR STORAGE DEVICE, AND ITS MANUFACTURE
摘要
申请公布号
JPH08148658(A)
申请公布日期
1996.06.07
申请号
JP19940285071
申请日期
1994.11.18
申请人
MITSUBISHI ELECTRIC CORP
发明人
KUNORI YUUICHI
分类号
H01L21/8247;H01L27/105;H01L27/115;H01L29/788;H01L29/792;(IPC1-7):H01L27/115;H01L21/824
主分类号
H01L21/8247
代理机构
代理人
主权项
地址
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