ATOMIC FORCE MICROSCOPE AND ANALYSIS OF FRICTION IN ATOMIC FORCE MICROSCOPE THEREIN

摘要

PURPOSE: To provide a friction analyzing method estimating the generation cause of the friction force of slide or shearing deformation from the change of the phase of twist vibration in such a case that the vertical load between a sample and a probe is changed and an atomic force microscope used therein. CONSTITUTION: The atomic force microscope 1 is equipped with a vibrator allowing relative lateral vibration to act on a sample 8 and a probe 4 and a vertical load adjusting device adjusting the vertical load between the sample 8 and the probe 4. The sample 8 is laterally vibrated and the phase and amplitude of the cantilever 11 excited by the lateral vibration of the sample 8 are simultaneously measured. The dependence on the vertical load between the sample 8 of the measured value and the probe 4 is measured to analyze the friction of the sample 8 and the probe 4.