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发明名称
PROTECTOR AND STOCKING METHOD OF PROBE CARD FOR MEASURING SEMICONDUCTOR
摘要
申请公布号
JPH08148535(A)
申请公布日期
1996.06.07
申请号
JP19940307032
申请日期
1994.11.15
申请人
SONY CORP
发明人
NAGASAKI KENICHI
分类号
G01R1/06;H01L21/66;(IPC1-7):H01L21/66
主分类号
G01R1/06
代理机构
代理人
主权项
地址
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