MICROMACHINED STRUCTURE WITH MINIMIZED STICTION

摘要

An electro-mechanical micromachined structure uses bumpers (52) to prevent contact between structures at different potentials. A beam (22) is connected to one or more anchors (26) by flexible suspensions (24), which permit the beam (22) to move along a predetermined axis relative to one or more plates (34, 36). The suspension (24) includes at least one bumper (52) positioned so that the bumper (52) will contact another part of the suspension (24) before the beam (22) contacts the plates. The bumper is made from the same material as the suspension (24), during the same processing step. The bumper (52) is positioned to take advantage of shrinkage or expansion of the beam (22) during processing which forces the bumper (52) closer to its contact point than would otherwise be possible.