Verfahren und Vorrichtung zur Aufbringung einer dünnen Schicht auf ein Substrat unter Druck

摘要

Apparatus and method for pressure and heat sticking a thin film to a base plate. The thin film (4) and a base plate (1) on a film like carrier (3) are introduced into a vacuum chamber (5) having upper and lower contact members (6a,6b) for compressing the thin film, base member and carrier into a stratified body. The thin film and base plate are held separate from one another in the chamber. The lower contact member moves upward to contact the carrier and base plate and to compress the stratified body between it and the upper contact member. The upper contact member is convex in shape and made of an elastic material so that the contact pressure on the film and base plate starts near the center and spreads toward the periphery resulting in improved sticking of thin film to the base plate with no air bubbles and no wrinkling. The pressure is applied in a vacuum or reduced atmospheric pressure and heat is simultaneously applied. A further compression in the air at atmospheric pressure is carried out by a heat and pressure roller (7b).