发明名称 |
Minienvironment for hazardous process tools |
摘要 |
A method and apparatus for providing a clean working area within an enclosure while simultaneously permitting open access to the working area from outside and also preventing any toxic substances from escaping the enclosure to contaminate a worker area. A higher pressure region within the enclosure near the aperture of the enclosure prevents dirt from entering and toxic materials from escaping. <IMAGE> |
申请公布号 |
EP0714701(A1) |
申请公布日期 |
1996.06.05 |
申请号 |
EP19950308356 |
申请日期 |
1995.11.21 |
申请人 |
AT&T CORP. |
发明人 |
JANKOSKI, CONSTANCE A.;SINCLAIR, JAMES DOUGLAS |
分类号 |
F24F7/06;B01L1/04;F24F3/16;G21F7/015 |
主分类号 |
F24F7/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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