发明名称 |
Method for sublimating a solid material and a device for implementing the method |
摘要 |
<p>The invention concerns a method and a device for sublimating a solid material. The device according to the invention comprises: a) an enclosure (10) into which the solid material is introduced, which is held between two plates (13) of porous material; b) means (14) for sublimating the solid material inside the enclosure (10) so as to produce a vapour phase from the solid material; c) means (11, 12) for introducing into the enclosure (10) a carrier gas for conveying the vapour phase; and d) means (15, 17) for evacuating the vapour phase and the carrier gas. Application to the sublimation of amino-borane powder for the doping of diamond layers. <IMAGE></p> |
申请公布号 |
EP0714999(A1) |
申请公布日期 |
1996.06.05 |
申请号 |
EP19950420314 |
申请日期 |
1995.11.15 |
申请人 |
KODAK-PATHE;EASTMAN KODAK COMPANY |
发明人 |
GARENNE, JEAN-JACQUES EDGAR;PONCELET, OLIVIER JEAN CHRISTIAN |
分类号 |
C23C16/448;B01D7/00;B01J7/00;C23C16/27;C23C16/44;(IPC1-7):C23C16/44;C23C16/26 |
主分类号 |
C23C16/448 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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