发明名称 Method for sublimating a solid material and a device for implementing the method
摘要 <p>The invention concerns a method and a device for sublimating a solid material. The device according to the invention comprises: a) an enclosure (10) into which the solid material is introduced, which is held between two plates (13) of porous material; b) means (14) for sublimating the solid material inside the enclosure (10) so as to produce a vapour phase from the solid material; c) means (11, 12) for introducing into the enclosure (10) a carrier gas for conveying the vapour phase; and d) means (15, 17) for evacuating the vapour phase and the carrier gas. Application to the sublimation of amino-borane powder for the doping of diamond layers. &lt;IMAGE&gt;</p>
申请公布号 EP0714999(A1) 申请公布日期 1996.06.05
申请号 EP19950420314 申请日期 1995.11.15
申请人 KODAK-PATHE;EASTMAN KODAK COMPANY 发明人 GARENNE, JEAN-JACQUES EDGAR;PONCELET, OLIVIER JEAN CHRISTIAN
分类号 C23C16/448;B01D7/00;B01J7/00;C23C16/27;C23C16/44;(IPC1-7):C23C16/44;C23C16/26 主分类号 C23C16/448
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