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发明名称
SAFETY APPARATUS AND OPERATING METHOD OF IC HANDLER
摘要
申请公布号
KR960007506(B1)
申请公布日期
1996.06.05
申请号
KR19960000786
申请日期
1996.01.17
申请人
ADVANTEST K.K.
发明人
SUZUKI, GENPEI;NAKAMURA, HIROTO;IGARASHI, NORIYUKI;GOZIMA, KATSUMI;GOZIMA, AKIO;KIYOKAWA, TOSHIYUKI;HAYAMA, HISAO
分类号
G01R31/26;H01L21/66;(IPC1-7):G01R31/26
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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