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发明名称
Laserinterferometersystem zum Überwachen und Regeln der Bearbeitung von integrierten Schaltungen
摘要
申请公布号
DE68926368(D1)
申请公布日期
1996.06.05
申请号
DE19896026368
申请日期
1989.07.25
申请人
APPLIED MATERIALS, INC., SANTA CLARA, CALIF., US
发明人
CHENG, DAVID, SAN JOSE CALIFORNIA 95128, US;HARTLAGE, ROBERT P., SUNNYVALE, CALIFORNIA 94089, US;ZHANG, WESLEY W., BURLINGAME CALIFORNIA 94010, US
分类号
G01B11/22;H01J37/32;H01L21/302;H01L21/3065;(IPC1-7):H01L21/306;G01B9/02
主分类号
G01B11/22
代理机构
代理人
主权项
地址
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