发明名称 |
Charged beam drawing apparatus |
摘要 |
In a charged beam drawing apparatus for drawing a desired pattern on a sample by deflecting a charged beam on the sample while continuously moving a stage on which the sample is placed, a mark having a line-and-space pattern, in which a plurality of heavy metal marks each having a width equal to a side of the charged beam are arranged with spaces each equal to the width between them, is formed on the sample. The charged beam is radiated onto the mark while the position of the beam is fixed, and at the same time the stage is continuously moved in the longitudinal direction of the mark, thereby detecting a reflected beam from the mark. On the basis of the signal of the detected reflected beam, a relative vibration during the continuous movement of the stage is measured. This makes it possible to measure the relative vibration produced by the continuous movement of the stage, resulting in an increase in drawing accuracy.
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申请公布号 |
US5523576(A) |
申请公布日期 |
1996.06.04 |
申请号 |
US19940213041 |
申请日期 |
1994.03.15 |
申请人 |
KABUSHIKI KAISHA TOSHIBA |
发明人 |
KOIKE, TOORU;MORI, ICHIRO;TAKIGAMI, YUJI;SUGIHARA, KAZUYOSHI;MIYAGAKI, ATSUSHI;KUSAKABE, HIDEO |
分类号 |
H01J37/304;(IPC1-7):G01N23/225 |
主分类号 |
H01J37/304 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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