| 发明名称 |
Highly-oriented diamond film |
| 摘要 |
The highly-oriented diamond film is a diamond film formed by chemical vapor deposition, with at least 95% of its area consisting of either (100) or (111) crystal planes, and the differences { DELTA alpha , DELTA beta , DELTA gamma } of the Euler angles { alpha , beta , gamma } between the adjacent crystals satisfying (| DELTA alpha |</=1 DEG , | DELTA beta |</=1 DEG and | DELTA gamma |</=1 DEG ) simultaneously. Thus obtained highly-oriented diamond film has few grain boundaries and high carrier mobility. And the area of the diamond film can be large.
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| 申请公布号 |
US5523160(A) |
申请公布日期 |
1996.06.04 |
| 申请号 |
US19950466922 |
申请日期 |
1995.06.06 |
| 申请人 |
KOBE STEEL USA, INC. |
发明人 |
KOBASHI, KOJI;NISHIMURA, KOZO;MIYATA, KOICHI;TACHIBANA, TAKESHI;STONER, BRIAN R. |
| 分类号 |
C30B25/02;C30B29/04;H01L21/205;H01L29/04;H01L29/16;(IPC1-7):H01L41/08 |
主分类号 |
C30B25/02 |
| 代理机构 |
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