Electrostatic actuator having ferroelectrics in which residual dielectric polarization is formed

摘要

An electrostatic actuator includes a supporting body having a plurality of electrodes are formed at predetermined intervals, and a movable body having a ferroelectrics layer having an area on which polarization charges based on residual dielectric polarization are distributed in a predetermined polarity pattern so as to correspond to the plurality of electrodes of the supporting body. Due to changing, based on switching a pattern of polarities of voltages supplied to the plurality of electrodes, electrostatic attraction and repulsion between the plurality of electrodes of the supporting body and the area of the ferroelectrics layer on which the polarization charges are distributed, the movable body are moved on the supporting body.