发明名称 |
Scanning electron microscope and image forming method therewith |
摘要 |
In an electron microscope for observing an image of a sample using secondary electrons emitted from the sample by two-dimensionally scanning an electron beam on the sample, a low magnification and wide view image of the sample is formed on one frame memory. The frame memory for storing on picture of the image is divided into an appropriate number of areas. The image data of the sample, obtained by consecutively moving the sample to the sample areas, is stored to the corresponding areas of the frame memory.
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申请公布号 |
US5523567(A) |
申请公布日期 |
1996.06.04 |
申请号 |
US19940330458 |
申请日期 |
1994.10.28 |
申请人 |
HITACHI, LTD.;HITACHI SCIENCE SYSTEMS, LTD. |
发明人 |
KAWAMATA, SHIGERU;OZASA, SUSUMU |
分类号 |
H01J37/22;H01J37/28;(IPC1-7):H01J37/28 |
主分类号 |
H01J37/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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