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发明名称
CONTINUOUS FILM FORMING DEVICE AND CONTINUOUS FILM FORMATION
摘要
申请公布号
JPH08144059(A)
申请公布日期
1996.06.04
申请号
JP19940282253
申请日期
1994.11.16
申请人
ASAHI GLASS CO LTD
发明人
IMASHIRO NOBUHIKO
分类号
C23C16/50;C23C16/54;H01L21/205;(IPC1-7):C23C16/50
主分类号
C23C16/50
代理机构
代理人
主权项
地址
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