发明名称 Single ended tuning fork inertial sensor and method
摘要 Single ended tuning fork inertial sensor having a housing and a single ended tuning fork of a quartz-like material of a predetermined thickness, the tuning fork has first and second tines lying in a plane and having an axis of symmetry and has a body formed integral with said first and second tines. The body is rigidly secured to the housing. The tines have a rectangular cross section and have a width which is different from the thickness. The body has a stem formed therein which has a width less than that of the body. Drive electrodes are secured to the tines. An oscillatory frequency is supplied to the above drive electrodes to excite the tines in a drive mode and in the presence of an axial angular rate to cause the tines to operate in a pickup mode which is substantially separated in frequency from the drive mode. The electrode patterns are laser trimmed in order to reduce quadrature offset.
申请公布号 US5522249(A) 申请公布日期 1996.06.04
申请号 US19940273656 申请日期 1994.07.12
申请人 NEW SD INC. 发明人 MACY, DAVID F.
分类号 G01M1/10;G01C19/56;(IPC1-7):G01P9/04 主分类号 G01M1/10
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