OPTICAL WAVEGUIDE, WAVEGUIDE TYPE OPTICAL SWITCH USING THAT AND ITS PRODUCTION

摘要

PURPOSE: To provide an optical waveguide having higher reliability, an energy- free waveguide optical switch, and to provide a production method for these. CONSTITUTION: This waveguide is obtd. by forming a lower clad layer 2, slab- type core layer 3 comprising an org. material, and ridge type upper clad layer 4 having a desired optical waveguide pattern on a substrate 1. The waveguide optical switch is produced by adding a photochromic compd. to the core layer 3 or the upper clad layer 4. In the production method of the optical waveguide or the optical switch, the slab core layer 3 is formed by spin coating and the upper clad layer 4 is formed by RIE or wet etching method to form the ridge. It is preferable that the optical waveguide pattern in the optical switch is the structure of Mach-Zehnder interferometer.