| 摘要 |
PURPOSE: To obtain an ultrasonic inspection equipment in which bubbling, wav ing and oscillation can be suppressed at the time of scanning. CONSTITUTION: Under a state where a specimen is set on the bottom of a water tank 1 and an array probe 51 is mounted on the case 50 of a probe 5 and immersed into the water in the water tank 1, ultrasonic scanning is carried out by means of an X-axis scanner 7 or a Y-axis scanner 8. Water level L2 in the water tank 1 is detected by means of a water level detector 10 and used in the operation of the extent of submersion [L2 -(L0 -L1 )] of the probe 5 along with the distance L1 between the origin O and the probe 5 and the distance L0 between the origin and the bottom face of the water tank. Subsequently, a scanning speed is determined and a corresponding extent of submersion is determined according to predetermined characteristics. Finally, the water level 2 is regulated to match the extent of submersion thus determined by means of the water tank 11 and respective pumps 111, 112. |
