| 摘要 |
<p>PURPOSE: To support and fix a substrate without causing scratches or contamination in the display part in a coating process for a sealing agent, laminating process, scribing process and braking process. CONSTITUTION: The top surface of a supporting bed 1 is processed raggedly so that the supporting bed touches only the non-display part 4a of a substrate 4 to be treated and that the substrate is fixed by vacuum sucking ports 2 formed in the contact area 1a. Since the display part 4b of the substrate 4 faces the non-contact part 1b of the supporting bed 1 and is protected from scratches or contamination, reliability is improved. The period for cleaning and exchanging for the supporting bed 1 is long and as a result, the effective throughput is increased and the cost is decreased.</p> |
