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发明名称
ARC DISCHARGE METHOD OF ION BEAM GENERATOR
摘要
申请公布号
JPH08138597(A)
申请公布日期
1996.05.31
申请号
JP19940280581
申请日期
1994.11.15
申请人
RIKAGAKU KENKYUSHO
发明人
TANBA MORITAKE
分类号
H01J27/08;H01J37/08;(IPC1-7):H01J37/08
主分类号
H01J27/08
代理机构
代理人
主权项
地址
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