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经营范围
发明名称
SURFACE FINISH METHOD
摘要
申请公布号
JPH08138544(A)
申请公布日期
1996.05.31
申请号
JP19940302854
申请日期
1994.11.12
申请人
DAINIPPON SCREEN MFG CO LTD
发明人
MIYAJI HIROYOSHI;SHIMADA SHOICHI;NISHIKUBO HIROAKI;OOTO MITSURU
分类号
C23F1/00;H01J9/14;H05K3/06;(IPC1-7):H01J9/14
主分类号
C23F1/00
代理机构
代理人
主权项
地址
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