| 摘要 |
PURPOSE: To measure size with high precision even when sensors have errors in set position. CONSTITUTION: When the size W of a test object 3 is measured based an measurement values Wa and Wb of photo-detective sensors 1 and 2 against a test object 3, into dimension calculation equation wherein position error quantityΔL,α=ΔA/A of photo-detective sensors 1 and 2 are introduced, measured values of photo-detective sensors 1 and 2 against a calibration plate 4, whose size is known, is substituted, so that, based on an error calculation part 10, position error quantityΔL,αof photo-detective sensors 1 and 2 are obtained, and from the size calculation equation which uses this position error quantityΔL, andα, the size W of the test object 3 is obtained by a measurement part 11.
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