发明名称 GROOVE WORKING DEVICE FOR PLATE END SURFACE OF THIN THING
摘要 <p>PURPOSE: To provide a working device which can easily grind a recessed groove to the plate end surface of a thin thing such as the inner circumferential surface of a carrier hole. CONSTITUTION: A fixed guide roller 2 and a movable guide roller 3 in which an engaging groove is provided in the circumference are mounted and supported in a device main body 1 and at the same time the respective guide rollers 2, 3 and a rotary grinding stone are disposed along the circumference of a virtual circle (b), and the movable guide roller 3 is movable and adjustably supported by a roller moving mechanism 5 and at the same time the rotary grinding stone is movably and adjustably supported by a grinding-stone moving mechanism 6.</p>
申请公布号 JPH08139167(A) 申请公布日期 1996.05.31
申请号 JP19940275255 申请日期 1994.11.09
申请人 NAOETSU DENSHI KOGYO KK 发明人 MIYAZAKI TADAO
分类号 B24B19/02;B24B9/00;H01L21/304;H01L21/68;H01L21/683;(IPC1-7):H01L21/68 主分类号 B24B19/02
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