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发明名称
SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要
申请公布号
JPH08139057(A)
申请公布日期
1996.05.31
申请号
JP19940273729
申请日期
1994.11.08
申请人
HITACHI LTD
发明人
SAKAZUME TATSUMI
分类号
G01R31/26;G01N27/04;H01L21/301;H01L21/66;(IPC1-7):H01L21/301
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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