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发明名称
Verbesserte Methode für anisotropisches Ätzen von Siliziumscheiben und Lösung dafür.
摘要
申请公布号
DE69022944(T2)
申请公布日期
1996.05.30
申请号
DE19906022944T
申请日期
1990.08.11
申请人
INTERNATIONAL BUSINESS MACHINES CORP., ARMONK, N.Y., US
发明人
AUSTIN, LARRY W., HINESBURG, VERMONT 05461, US;LINDE, HAROLD G., RICHMOND, VERMONT 05477, US
分类号
H01L21/308;H01L21/306;(IPC1-7):H01L21/306
主分类号
H01L21/308
代理机构
代理人
主权项
地址
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