发明名称 SEMICONDUCTOR DEVICE
摘要 PURPOSE: To obtain a semiconductor device having a bump electrode of novel structure in which an alloy, e.g. an Au-Sn alloy, formed through reaction of an Sn plating layer on the surface of an inner lead and a bump electrode does not reach the bottom face in a passivation opening. CONSTITUTION: A passivation opening 9 has the center located closer to the center of a semiconductor substrate than the center of a bump electrode 5. The center of the passivation opening 9 is separated farther from outer lead and located closer to the tip of inner lead than the center of the bump electrode 5. Since the center of passivation opening is located closer to the center of semiconductor substrate than the center of the bump electrode, an alloy, e.g. an Au-Sn alloy, produced through reaction of the Sn plating layer of inner lead and the gold layer of bump electrode is prevented reaching the bottom of the passivation opening without varying the height of the bump electrode 5 or the size of the passivation opening 9.
申请公布号 JPH08139128(A) 申请公布日期 1996.05.31
申请号 JP19940302843 申请日期 1994.11.12
申请人 TOSHIBA MICROELECTRON CORP;TOSHIBA CORP 发明人 HOSOMI HIDEKAZU;TAKUBO TOMOAKI;TAZAWA HIROSHI;SHIBAZAKI YASUSHI
分类号 H01L21/60;H01L23/485 主分类号 H01L21/60
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