| 摘要 |
PURPOSE:To join electrode metal tightly with an insulating layer, to improve the reliability of the sensor, and to display stable performance by joining the electrode metal to an intermediate joint layer with a metal compound layer. CONSTITUTION:The intermediate joint layer 6 with high resistance is provided between the insulating substrate 1 and electrodes 2, 3, and 4, and the metal compound layer 50 consisting of the material of the intermediate joint layer 5 and the metal material of the electrodes is formed in the border surfaces between the intermediate joint layer 5 and electrodes 2, 3, and 4. Consequently, the intermediate joint layer 5 and electrodes are coupled chemically and the joining force between the both becomes extremely large, so that the electrodes are joined strongly to the insulating substrate. |
