| 摘要 |
<p>A mandrel is used in the manufacture of an ink jet orifice plate. The mandrel comprises a glass substrate (14) and an etched Titanium-Tungsten layer (16) having a thickness of approximately 2000 ANGSTROM to 5000 ANGSTROM residing on the substrate. The mandrel is manufactured by depositing a 2000 ANGSTROM to 5000 ANGSTROM thick layer of Titanium-Tungsten (16) on a substrate, and then depositing a photoresist layer (18) on the Titanium-Tungsten layer in a spin coater. The photoresist layer is cured, and a patterned photomask is positioned on the photoresist layer. The photoresist layer is exposed to actinic radiation and then developed to produce a photomask pattern on the photoresist layer. The next step is to plasma etch the Titanium-Tungsten layer with a Halogen containing gas to form an etched conducting film mold. Finally, the remaining photoresist layer is stripped to complete construction of the mandrel, so the mandrel is reusable without any additional preparation. <IMAGE> <IMAGE> <IMAGE> <IMAGE> <IMAGE> <IMAGE> <IMAGE> <IMAGE></p> |
