发明名称 METHOD AND APPARATUS FOR EXHAUST GAS TREATMENT
摘要 <p>PURPOSE: To reduce the amount of discharged recovery drainage and the running cost of an apparatus by vaporizing adsorbed substances by heating an adsorbent, collecting the vaporized gas by transportation gas, and condensing it during regeneration. CONSTITUTION: When an adsorbent in an adsorption column 1 is saturated, exhaust gas is adsorbed by an adsorption column 2, and the adsorbent in the column 1 is regenerated by spraying steam to the adsorbent. During regeneration, an electric heater inserted between panels filled with the adsorbent is switched on, a slide damper 13 is closed to make the adsorption column in a closed state, and transportation gas of inert gas such as nitrogen is introduced from the upper part of the adsorption column. Nitrogen and drainage are discharged from the lower part and sent to a condenser 10 to be condensed.</p>
申请公布号 JPH08131751(A) 申请公布日期 1996.05.28
申请号 JP19940278891 申请日期 1994.11.14
申请人 FUJITSU LTD;FUJITSU VLSI LTD 发明人 TERAMOTO HIROSHI
分类号 B01D53/04;(IPC1-7):B01D53/04 主分类号 B01D53/04
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