发明名称 Apparatus and method for measuring absolute measurements having two measuring interferometers and a tunable laser
摘要 An apparatus and method for measuring absolute measurements having two measuring interferometers and a tunable laser emitting a laser beam. The two measuring interometers each have their own measuring lines and are supplied with the beam from one and the same laser. A reference line is established from the arithmetic sum or difference of the two measuring lines and is maintained at a constant value.
申请公布号 US5521704(A) 申请公布日期 1996.05.28
申请号 US19940237354 申请日期 1994.05.02
申请人 THIEL, JURGEN;MICHEL, DIETER;FRANZ, ANDREAS 发明人 THIEL, JURGEN;MICHEL, DIETER;FRANZ, ANDREAS
分类号 G01B9/02;G01J9/02;(IPC1-7):G01B9/02;G01B11/02 主分类号 G01B9/02
代理机构 代理人
主权项
地址