| 摘要 |
PURPOSE: To produce high-purity gaseous nitrogen trifluoride by using ammonium hydrogen fluoride as the electrolyte and conducting molten salt electrolysis with use of a specified-purity nickel electrode. CONSTITUTION: A nickel electrode contg., by weight, <=20ppm S as the impurity is used as the electrode to be used for electrolysis, and molten salt electrolysis is conducted with ammonium hydrogen fluoride as the electrolyte to obtain high-purity nitrogen trifluoride. As the conditions of electrolysis, the temp. is kept at 110-140 deg.C, a DC current is applied, and electrolysis is carried out at 5-10V and 1-15A/cm<2> current density. Gaseous NF3 is generated from an anode by this molten salt electrolysis, and gaseous H2 is generated from a cathode. The generated gaseous NF3 is introduced into a refiner through a conduit. |
