| 摘要 |
PURPOSE: To provide an ion-radiating apparatus in which a control voltage for radiating generated ions can be lowered and which has a simple structure. CONSTITUTION: The ion-radiating apparatus comprises an ion generator 100 having an ion chamber 130 formed as an electrically insulated closed space and discharge electrodes 111, 113 disposed in the chamber 130, an opening 131 communicating the chamber 130 with the exterior, a control electrode 210 disposed adjacent to the opening 131 at the outer surface of the opening 131, and an opposite electrode 300 for giving an electric field for accelerating the ion to implant the discharged ion to an object. |
