| 摘要 |
PCT No. PCT/DE94/00286 Sec. 371 Date Oct. 14, 1994 Sec. 102(e) Date Oct. 14, 1994 PCT Filed Mar. 17, 1994 PCT Pub. No. WO94/23088 PCT Pub. Date Oct. 13, 1994.An apparatus is proposed for producing a plasma polymer protective layer on workpieces, in particular headlamp reflectors (10), which has a coating chamber (18) into which a polymerizable monomer can be introduced and in which microwaves produce, in the region of the magnetic field of permanent magnets, a plasma for depositing the polymer protective layer on the workpieces held on the workpiece carriers (11). The permanent magnets are arranged on the workpiece carriers (11). Furthermore, there is provided a transport device (12) which conveys the workpiece carriers (11) through the coating chamber (18), which transport device possesses a return line, having a cleaning station (22), for the workpiece carriers (11) outside the coating chamber (18) for returning the workpiece carriers (11) from the exit to the entrance of the coating chamber. By this means, the known ECR coating process can, with continuous cleaning of the magnets, be used in an in-line process.
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