SPECIMEN HOLDER AND APPARATUS FOR TWO-SIDED ION MILLING SYSTEM

摘要

An apparatus and a specimen holder adapted to permit simultaneous two-sided ion beam milling at very low angles of beam incidence, down to 0 DEG , from both sides of the specimen (10) is provided and includes a specimen holder for two-sided ion beam milling and a pedestal (18) having at least one extending specimen support arm (12) adapted to engage a peripheral edge (104) of a specimen (10). The specimen (10) is secured to the at least one specimen support arm (12), preferably, so as to permit ion beams to be directed at the first and second major surfaces (100 and 102) of the specimen (10) simultaneously at very low angles of incidence down to 0 DEG . Both rapid milling as well as a reduction in artifacts provide high quality specimens for transmission electron microscopy analysis.