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发明名称
Wafer Prüfstation mit Zusatzhaltetischen
摘要
申请公布号
DE69302215(D1)
申请公布日期
1996.05.23
申请号
DE19936002215
申请日期
1993.05.20
申请人
CASCADE MICROTECH, INC., BEAVERTON, OREG., US
发明人
HARWOOD, WARREN K., VANCOUVER, WASHINGTON 98682, US;TERVO, PAUL A., VANCOUVER, WASHINGTON 98692, US;WARNER, RICHARD H., PORTLAND, OREGON 97202, US
分类号
G01R31/26;G01R1/067;H01L21/66;H01L21/683;(IPC1-7):H01L21/00
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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