Semiconductor direction deviation or yaw sensor for motor vehicle navigation

摘要

The deviation sensor includes a moving area (900) of a bridge structure positioned at a preset distance from a semiconductor substrate. This is made to oscillate by excitement induced between two fixed electrodes (902,903). Also provided are respective vertical (906) and horizontal (904) displacement detectors to detect the vertical and horizontal displacement of the moving area. Signals from the vertical detector are transmitted through switching circuits (905,907) via a temperature compensation switch (908) and signal processor (909) to provide an output signal which gives the deviation value. A variation compensation correcting circuit (910) detects through the horizontal displacement detectors the amplitude of the moving area. This shows the resonance-frequency induced in the oscillation.